Highlights
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Fully automatic probe stationSupports automatic and semi-automatic wafer loading and unloading
Compatible with 12-inch and 8-inch wafers
Wafer thickness 200μm - 2000μm -
Edge CouplingReal-time monitoring of distance using nano displacement sensors to reduce the risk of damaging optical fibers
High-precision vision system, reducing errors caused by small angles -
Vertical CouplingAlignment of wafer level grating couplers using vertical coupling method
Supports spiral scanning and gradient scanning (coupling time <2s) -
Automated Fiber CalibrationAutomated calibration script, angle calibration of the fiber array can be completed within 3 mins
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Modular Platform SoftwareSupports Notch Up/Down continuous testing, no need to cut the piece, saving testing time
Integrate most of the current silicon photonic wafer testing items, pure optical test/pure electrical test/optical-electrical hybrid test -
Self-developed SMUHigh-precision 12-channel card-type SMU, high integration, saving machine space
±10 V, 50mA, the range perfectly covers the silicon light testing requirements -
Equipped with a Height TesterSolves the flatness problem of the wafer on the chuck
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Test Temperature RangeRoom temperature 25°~150°
(other temperatures can be customized)
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