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Wafer Acceptance Test
WAT6200S
Serial Parametric Test System
WAT6200S is a serial parametric test system that can quickly perform accurate DC measurements, capacitance measurements, and other high-frequency applications (such as ring oscillator measurements), flash memory tests and so on.WAT6200S built-in a low-leakage switch matrix with 14 input ports and configurable, maximum 48 output ports (x12, x24, x36, x48). It supports a special pin connecting to prober chuck. WAT6200S supports up to 8 source measurement unit (SMU) inputs, each can source and measure individual current or voltage. The system supports up to 4 channels of high-voltage semiconductor pulse generation unit (HV-SPGU), providing fast pulse generation capabilities for modern advanced flash memory testing. The system also supports access to external instruments such as DVM, LCR, Signal Analyzer, etc. via 6 auxiliary input ports and is able to achieve high-precision serial measurements of voltage, capacitance, frequency, etc.
Highlights
  • Self-developed hardware resources
    Self-developed SMU, PGU, Low-leakage Swith Matrix, stable supply chain，short lead time
  • Flexible configuration of Pin number
    Support 14 input ports, 48 output ports, independent port to chuck reduced cost for upgrade
  • High precision
    The accuracy down to 1pA, system leakage current ＜1pA
    Extremely low current measurement
  • SECS/GEM compliance
    Easy integration to customer EAP or factory automation
  • Built-in Maintenance software
    Fast troubleshooting and diagnostic of hardware problem, timely guarantee of tester performance
  • Compatible with 48pin 230mm-diamter probe card
    Protect customer investment on probe card, low migration cost to new tester
  • High adaptability and full compatibility
    Familiar environment and easy to use, Python language for algo
  • Compatible with mainstream probers
    TEL P8XL/P12/P12XL/Precio XL, TSK UF200/UF3000/UF3000EX, etc.
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