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Wafer Level Reliability
WLR0200
Single-site Wafer Level Reliability Test Equipment
The WLR0200 Single-site Wafer-Level Reliability Test Equipment is a reliability test equipment designed and developed based on the JEDEC reliability test standard, which mainly consists of a tester and a probe table, and it can realise the test of TDDB/HCI/BTI/NBTI/QBD/AC BTI/CV/Vth and other functions.
Highlights
  • High temperature resistance
    Probe table temperature up to 300 ℃
  • Supports 4-12 inch wafers
    Using MPI customized high-temperature semi-automatic probe stations
  • High testing frequencyup to 1MHz
    Using high-precision and high-frequency capacitance testing instruments
  • Independently developed
    The testing Source meter unit adopts high-precision SMU self-developed by Nexustest Instruments
  • Multiple measurement modes
    Supports TDDB/HCI/NBTI/EM test modes
  • Real-time curve display
    Real-Time Wafer Map and Test Curve Display
  • Nitrogen Protection
    Platform unificationPrevents wafer oxidation (non-pressurized)
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