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Wafer Acceptance Test
WAT6300
High Voltage Serial Parametric Test System
The Nexustest WAT6300 series High Voltage Serial Parametric Test System can be optionally equipped to achieve vertical and general high voltage wafer-level parameter testing, and can quickly perform accurate high and low voltage DC measurements, capacitance measurements, and more. The vertical test system is equipped with a low voltage and low leakage matrix and a dual-output high voltage matrix, supporting one CHUCK and one planar high voltage output. Under the condition of CHUCK high voltage at 3500V, it can support up to 24 channels of low voltage output on the front side, and under the condition of CHUCK at less than 600V, it can support up to 48 channels of low voltage output on the front side. The universal test system can be optionally equipped with a medium voltage 1800V or high voltage 3500V switching matrix, expandable to a maximum of 48 or 24 channels and CHUCK output, suitable for testing both planar and vertical devices. The universal medium voltage serial WAT tester also supports 48 channels of full Kelvin output, with all instruments housed in a cabinet, using Cable OUT method in conjunction with fully automatic or semi-automatic probe stations. Both vertical and general systems are equipped with high and low voltage protection circuits to enhance system operational stability.
Highlights
  • Self-developed hardware resources
    Self-developed SMU & HV-SMU, HV-SPGU,
    Medium & High-voltage Low-leakage Switch Matrix
    Stable supply chain, short lead time
  • Strong capabilities
    Perpin SMU output capability 200V max, 1A max
    Perpin PGU output capability ±20V (open)
  • Flexible configuration of Pin number
    Supports 48 pin full kelvin pins
  • High precision
    System leakage current ＜500fA
    Extremely low current measurement
  • SECS/GEM compliance
    Easy integration to customer EAP or factory automation
  • Built-in Maintenance software
    CAL/DIAG/PV Fast troubleshooting and diagnostic of hardware problem
  • 48pin 230mm-diamter probe card
    Protect customer investment on probe card, low migration cost to new tester
  • Compatible with mainstream probers
    TEL P8XL/P12/P12XL/Precio XL, TSK UF200/UF3000/UF3000EX, etc.
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