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Wafer Level Burn-In
AL3500A
Wafer Auto Loading/Unloading System
AL3500A is an automated auxiliary equipment for Wafer Level Burn-In System WLR3500, assist the operator to complete the wafer alignment and fixture automatic installation.
Highlights
  • Adapter products
    Support 4-6 inch wafer load/unload automatically
    Wafer thickness>150 um
  • Quantity
    Wafer quantity≤25 pcs
    Fixture quantity≤6 pcs
  • Speed
    <8 min/pcs
  • Position accuracy
    ±50 um
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